Applications of LIGA Micro-machining

Mechatronics

LIGA Micro-manufacturing

Applications in various areas

Megh D

Introduction

LIGA Micro-machining is a manufacturing process implemented to manufacture micro-mechatronic components. LIGA is an abbreviation used for 3 processes, Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding). 

LIGA is an additive manufacturing process, used to make molds or directly the end product. Surface or Bulk machining are also micro-machining processes.

Applications

LIGA process finds its applications in a lot of Micro-Electro-Mechanical Systems (MEMS) related products. LIGA machining processes are used where other micro-machining processes like Surface machining or Bulk machining cannot be used. Very complex and intricate parts can be manufactured using LIGA machining process.

Electronic Components

• Chips
• Computer chips have very intricate circuits on a very small area.
• The routing if placed end-to-end can sometimes range for miles.
• Ex. CPUs, GPUs, etc
• Electronic components
• A lot of very small-sized Transducers such as Thermistors, Piezoelectric sensors, pressure sensors are manufactured using LIGA processes.
• Very small ICs and diodes can also be produced.

Mechanical Components

• All types of the planar component such as levers, gears, actuators, splines, supports, fixtures can be manufactured using LIGA micro-machining processes.
• A very high level of accuracy is obtained using this process.

Examples of electromechanical systems with the use of LIGA processes:

• Accelerometers → Use very small springs and fixed plates. When the springs experience a movement due to the acceleration of the body in a certain direction, change in the electric field which generates an analog signal.
• Magnetometer → Used as an electronic compass