LIGA Process - Principle and Steps

Mechatronics LIGA Micro-manufacturing Applications in various areas Megh D Introduction LIGA Micro-machining is a manufacturing process implemented to manufacture micro-mechatronic components. LIGA is an abbreviation used for 3 processes, Lithographie, Galvanoformung, Abformung ( Lithography , Electroplatin g, and Molding ).  LIGA is an additive manufacturing process, used to make molds or directly the end product. Surface or Bulk machining are also micro-machining processes. Applications LIGA process finds its applications in a lot of Micro-Electro-Mechanical Systems (MEMS) related products. LIGA machining processes are used where other micro-machining processes like Surface machining or Bulk machining cannot be used. Very complex and intricate parts can be manufactured using LIGA machining process. Electronic Components Chips Computer chips have very intricate circuits on a very small area. The routing if placed end-to-end can sometimes range for...

Mechatronics  LIGA Micro-manufacturing Principle and Process Steps Megh D  Principle LIGA Micro-machining is a manufacturing process implemented to manufacture micro-mechatronic components. LIGA is an abbreviation used for 3 processes, Li thographie, G alvanoformung, A bformung ( Lithography , Electroplating , and Molding ) .  LIGA is an additive manufacturing process, used to make molds or directly the end product. Surface or Bulk machining are also micro-machining processes. Steps Following are the steps involved in LIGA machining... Step 1: Substrate This is the base layer in the LIGA micro-manufacturing process. A Silicon wafer or a polished disk of beryllium, copper, titanium or other similar metal can be used. The substrate needs to conduct electricity. If not already conductive a thin layer of conductive material is applied. Step 2: Application of PMMA Poly(methyl metacrylate) — PMMA also known as Plexiglass is the second layer...